Overview

3D hybrid optical inspection system
Multi-purpose optical inspection systems for all markets
Super high-speed and high-accuracy 3D inspection

Super high-speed 3D inspections
56.8 cm2/sec  (under optimum conditions)

Super high-accuracy 3D inspections
8-way projector

4-way oblique imaging inspections
20-megapixels 4-angle camera

Device inspection features
5 μm resolution / coaxial lighting