3D hybrid optical inspection system
Multi-purpose optical inspection systems for all markets
Super high-speed and high-accuracy 3D inspection
Super high-speed 3D inspections
56.8 cm2/sec (under optimum conditions)
Super high-accuracy 3D inspections
8-way projector
4-way oblique imaging inspections
20-megapixels 4-angle camera
Device inspection features
5 μm resolution / coaxial lighting